(Invited) 3D Interconnect Technologies for Advanced MEMS/NEMS Applications
نویسندگان
چکیده
منابع مشابه
Advanced Interconnect Technologies for Future ULSI Applications
Scaling trends and limitations of existing interconnect technologies are discussed and two prospective future solutions carbon nanotube (CNT) and optical interconnects are examined in detail. The inherent unscalability of metal interconnects and degradation of their performance in the light of ever-increasing transistor density and performance is emphasized. Problems with multi-layer low-k/copp...
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ژورنال
عنوان ژورنال: ECS Transactions
سال: 2019
ISSN: 1938-6737
DOI: 10.1149/1.3390661